[18a-D1-1~10] 6.2 カーボン系薄膜

△ [18a-D1-10] Fluorine Termination of Diamond Surface by F₂ gas

^○Mikinori Kobayashi¹, Yukihiro Shintani^1,2, Miho Myodo¹, Hiroshi Kawarada¹ (Waseda Univ.¹, Yokogawa Electric Corp.²)

キーワード：ダイヤモンド,フッ素