[18a-D1-1~10] 6.2 カーボン系薄膜

△ [18a-D1-4] High quality heteroepitaxial diamond growth using fine-line nucleation region-2 -Dislocation density examination-

^○Genta Nozaki¹, Hideyuki Kodama¹, Kazuhiro Suzuki², Shozo Kono¹, Atsuhito Sawabe¹ (Aoyama Gakuin Univ.¹, TOPLAS ENGINEERING CO.,LTD.²)

キーワード：Diamond