[18a-D1-1~10] 6.2 カーボン系薄膜

△ [18a-D1-5] Improvement of the electrical characteristics by the boron δ-doping

^○Takuma Minamiyama¹, Norio Tokuda^1,2,3, Masahiko Ogura^2,3, Satoshi Yamasaki^2,3, Takao Inokuma¹ (Grad. School of Natural Sci. & Tech. Kanazawa Univ.¹, AIST², JST,CREST³)

キーワード：δドーピング,ダイヤモンド