[18a-D6-1~9] 14.2 Ultrathin films and quantum nanostructures

△ [18a-D6-8] Optimization of GaAs Quantum Nanodisks Fabrication Process by Combination of A Bio-template and Neutral Beam Etching

^○Yosuke Tamura^1,4, Akio Higo², Cédric Thomas^1,4, Takeru Okada¹, Ichiro Yamashita^3,4, Seiji Samukawa^1,2,4 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², NAIST³, JST-CREST⁴)

Keywords:中性粒子ビームエッチング,量子ドットレーザー,フェリチン