Influence of high voltage application on the piezoelectric property of microfabricated MPB and  tetragonal composition PZT thin films

Natsumi Makimoto

Presentation information

Poster presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[18a-P1-1~10] 6.1 Ferroelectric thin films

Wed. Sep 18, 2013 9:30 AM - 11:30 AM P1 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[18a-P1-4] Influence of high voltage application on the piezoelectric property of microfabricated MPB and tetragonal composition PZT thin films

^○Natsumi Makimoto¹, Yasuhiro Suzuki^1,2, Ryutaro Maeda¹, Takahiro Oikawa³, Hiroshi Funakubo³, Takeshi Kobayashi¹ (AIST¹, Ibaraki Univ.², Tokyo Tech.³)

Keywords:PZT薄膜,圧電

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