[18a-P4-1~52] 11 Superconductivity

[18a-P4-51] Improvement in Fabrication Process of Small Al Trilayer Josephson Junctions

^○Tetsuro Satoh¹, Yoshiji Noguchi¹, Masashi Yamagishi¹, Shuichi Nagasawa¹, Kenji Hinode¹, Mutsuo Hidaka¹, Masaaki Maezawa¹, Tsuyoshi Horikawa¹ (AIST¹)

Keywords:超伝導量子ビット,ジョセフソン接合