The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[18p-A13-1~14] 7.1 X-ray technologies

Wed. Sep 18, 2013 1:30 PM - 5:15 PM A13 (TC1 3F-323)

4:00 PM - 4:15 PM

[18p-A13-10] Development of dot-target for high-brightness EUV source

○Takeshi Higashiguchi1, Ryoichi Hirose2, Yuhei Suzuki1, Masato Kawasaki1, Atsushi Sunahara3, Akira Endo4 (Utsunomiya Univ.1, Tohoku Univ.2, Inst. of Laser Technol.3, HiLase Project4)

Keywords:高輝度,EUV