4:30 PM - 4:45 PM
[18p-A13-12] Electron density measurement of spherical symmetry BEUV plasma radiation
Keywords:EUV光源,ガドリニウム,BEUV
Oral presentation
07. Beam Technology and Nanofabrication » 7.1 X-ray technologies
Wed. Sep 18, 2013 1:30 PM - 5:15 PM A13 (TC1 3F-323)
4:30 PM - 4:45 PM
Keywords:EUV光源,ガドリニウム,BEUV