Increase of Conversion Efficiency from Laser to Extreme UltraViolet Emission

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

Wed. Sep 18, 2013 1:30 PM - 5:15 PM A13 (TC1 3F-323)

3:45 PM - 4:00 PM

^○Atsushi Sunahara¹, Katsunobu Nishihara², Akira Sasaki³ (ILT¹, ILE,Osaka Univ.², JAEA, KAPRI³)

Keywords:極端紫外光源,リソグラフィー