[18p-A4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

[18p-A4-17] Interface State Density Measurement of 3D Silicon Structures Using Charge Pumping Method

^○Kou Ishikawa¹, Tomoya Shoji², Kuniyuki Kakushima³, Hitoshi Wakabayashi³, Yoshinori Kataoka³, Akira Nishiyama³, Nobuyuki Sugii³, Kazuo Tsutsui³, Kenji Natori², Hiroshi Iwai² (Tokyo Tech. Department of Engineering¹, Tokyo Tech. FRC², Tokyo Tech. IGSSE³)

Keywords:チャージポンピング法,界面準位,シリコン