[18p-A4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [18p-A4-4] Generation and incorporation of clusters at initial phase of silane discharge plasmas

^○Yuji Hashimoto¹, Susumu Tokou¹, Yeonwon Kim¹, Daisuke Yamashita¹, Giichirou Uchida¹, Hyunwoong Seo¹, Naho Itagaki^1,2, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹ (Kyushu Univ.¹, PRESTO, Japan Science and Technology Agency²)

Keywords:アモルファスシリコン太陽電池,ナノ粒子,光劣化