[18p-A4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

[18p-A4-7] Study of p-type-doping characteristics in a-Si:H, a-SiO:H and a-SiC:H

^○Yoshihiko Kitani¹, Kann Tanaka¹, Yasusi Sobajima^1,2, Chitose Sada^1,2, Akihisa Matsuda^1,2, Hiroaki Okamoto^1,2 (Grad. School of Eng. Sci., Osaka Univ¹, JST-CREST²)

Keywords:アモルファスシリコンカーバイド,PE-CVD