[18p-B4-1~12] 15.5 IV-group crystals and IV-IV-group mixed crystals

△ [18p-B4-1] Temperature dependence of growth rate on (311) facet in Ge selective growth with CVD

^○Yasutaka Mizuno¹, Naoyuki Kawai¹, Kazumi Wada¹ (Univ. of Tokyo¹)

Keywords:選択成長,Ge,シリコンフォトニクス