3:30 PM - 3:45 PM
△ [18p-C1-10] Dry Etching of Si by Using Pd Catalyst and Formation of Through Holes
Keywords:シリコンエッチング,貫通孔
Oral presentation
13. Semiconductors A (Silicon) » 13.2 Semiconductor surfaces
Wed. Sep 18, 2013 1:00 PM - 4:30 PM C1 (TC3 1F-101)
3:30 PM - 3:45 PM
Keywords:シリコンエッチング,貫通孔