The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.2 Semiconductor surfaces

[18p-C1-1~13] 13.2 Semiconductor surfaces

Wed. Sep 18, 2013 1:00 PM - 4:30 PM C1 (TC3 1F-101)

1:15 PM - 1:30 PM

[18p-C1-2] EUPS observation of hydrogen passivation of dopants in Si wafers

Tomoaki Ishitsuka1, ○Toshihisa Tomie1, Toshihiko Kanayama2 (AIST RIIF1, AIST2)

Keywords:ドーパントの不動態化,EUPS,弗酸浸漬