[18p-C13-1~9] 3.2 Materials optics

[18p-C13-6] [INVITED]Development of Optical Lithography Process for Blazed Diffraction Grating

^○Kazuyuki Kakuta¹, Daisaku Sugi¹, Shigeru Matsui², Yoshisada Ebata², Tetsuya Watanabe², Norio Hasegawa² (Hitachi, Ltd., Micro Device Division¹, Hitachi High-Technologies Corp.²)

Keywords:回折格子,リソグラフィー,3次元加工