[18p-C9-1~14] 11.2 Thin films, thick films, coated conductors and thin film crystal growth

[18p-C9-3] A new laser scribing technique for Y-based coated conductors

^○Takato Machi¹, Koichi Nakao¹, Keiichi Tanabe¹ (ISTEC-SRL¹)

Keywords:レーザスクライビング,マルチフィラメント