[18p-D2-1~15] 6.5 Surface physics and vacuum

[18p-D2-5] Analysis of electronic states in initial oxidation processes on Si(113)

^○Shin-ya Ohno¹, Sousuke Abe¹, Shu Miura¹, Takuma Narishige¹, Akitaka Yoshigoe², Yuden Teraoka², Tetsuji Yasuda³, Masatoshi Tanaka¹ (Yokohama Nat'l Univ.¹, JAEA², AIST³)

Keywords:酸化反応,シリコン,光電子分光