[18p-D3-1~17] 6.3 Oxide-based electronics

△ [18p-D3-16] Topotactic fluorination of SrFeOx thin films

^○Tsukasa Katayama¹, Akira Chikamatsu^1,2, Yasushi Hirose^1,2,3, Ryosuke Takagi¹, Hideyuki Kamisaka^1,2, Tomoteru Fukumura^1,2, Tetsuya Hasegawa^1,2,3 (University of Tokyo¹, JST-CREST², KAST³)

Keywords:酸化物薄膜,パルスレーザー堆積法