[18p-D3-1~17] 6.3 Oxide-based electronics

△ [18p-D3-17] Fluorination of RNiO₃ (R=La, Nd) thin films with polyvinylidene fluoride

^○Tomoya Onozuka¹, Akira Chikamatsu^{1, 2}, Tsukasa Katayama¹, Tomoteru Fukumura^{1, 2}, Tetsuya Hasegawa^{1, 2, 3} (Univ. of Tokyo¹, JST-CREST², KAST³)

Keywords:パルスレーザー蒸着法,酸フッ素化物,PLD