[18p-D3-1~17] 6.3 Oxide-based electronics

△ [18p-D3-9] Phase stability and crystal structure of ZnIn2O4 thin film prepared using PLD

^○ryota izawa¹, kazuki tanemura¹, naonori sakamoto¹, kazuo shinozaki², hisao suzuki¹, naoki wakiya¹ (Shizuoka Univ¹, Tokyo Tech²)

Keywords:結晶構造,エピタキシャル成長