The 74th JSAP Autumn Meeting,2013

Presentation information

Poster presentation

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[18p-P10-1~13] 13.6 Silicon devices / Integration technology

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P10 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[18p-P10-4] Poly Germanium Junctionless Tri-gate FET for 3-D Stacked IC

Yoshiki Kamata1, Yuuichi Kamimuta1, Keiji Ikeda1, Kiyoe Furuse1, Mizuki Ono1, Minoru Oda1, Yoshihiko Moriyama1, Kouji Usuda1, Masahiro Koike1, Toshifumi Irisawa1, Etsuo Kurosawa1, Tsutomu Tezuka1 (AIST GNC1)

Keywords:ゲルマニウム,ジャンクションレス,トランジスタ