[18p-P9-1~10] 13.3 Insulator technology

▲ [18p-P9-2] Impacts of Hydrogen and Oxygen on Electrical Properties of Poly-crystalline Germanium Thin Film Transistors

^○Shoichi Kabuyanagi^{1, 2}, Tomonori Nishimura^{1, 2}, Kosuke Nagashio^{1, 2}, Akira Toriumi^{1, 2} (The Univerisity of Tokyo¹, JST-CREST²)

Keywords:多結晶Ge