1:30 PM - 3:30 PM
[18p-P9-6] DLTS Evaluation of Near-Interface Traps in GeNx/Ge Structures Fabricated by ECR-Plasma Techniques Ⅱ
Keywords:Ge-MIS,DLTS
Poster presentation
13. Semiconductors A (Silicon) » 13.3 Insulator technology
Wed. Sep 18, 2013 1:30 PM - 3:30 PM P9 (Davis Memorial Auditorium)
1:30 PM - 3:30 PM
Keywords:Ge-MIS,DLTS