[Young Scientist Oral Presentation Award Speech](15 min.) c-axis parallel polarity inverted multilayered AlN film by ion beam assisted deposition (IBAD)

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

Thu. Sep 19, 2013 10:00 AM - 12:00 PM A12 (TC1 3F-316)

10:00 AM - 10:15 AM

^○Masashi Suzuki¹, Takahiko Yanagitani¹ (Nagoya Inst. Tech.¹)

Keywords:イオンビームアシスト成膜法,c軸平行AlN薄膜,極性反転多層構造