Reverse annealing effect of Si<sub>1-x</sub>Ge<sub>x</sub>/Si by annealing after IBIEC

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

Thu. Sep 19, 2013 10:00 AM - 12:00 PM A12 (TC1 3F-316)

10:45 AM - 11:00 AM

^○Wataru Sekine¹, Yasuhiro Yamamoto¹, Tomoaki Nishimura² (Hosei Univ.¹, Research Center of Ion Beam Technology²)

Keywords:IBIEC,Reverse annealing effect,SiGe