[19a-A4-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

[19a-A4-2] Passivation quality of AlOx film deposited by mist CVD

^○Koji Iguchi^1,3, Shohei Miki^1,3, Hiroki Imaeda^1,3, Chikako Sakai^1,3, Haruhiko Yoshida^1,3, Yasushi Hotta^1,3, Atsushi Ogura^2,3, Shin-ichi Satoh^1,3, Koji Arafune^1,3 (Univ. of Hyogo¹, Meiji Univ.², JST-CREST³)

Keywords:パッシベーション,酸化アルミニウム,ミストCVD