[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

△ [19a-B4-11] Fabrication of variable transmission optical attenuator based on subwavelength grating

^○Hiroaki Honma¹, Kazuhiro Takahashi¹, Hiromu Ishii¹, Makoto Ishida¹, Kazuaki Sawada¹ (Toyohashi University of Technology¹)

Keywords:サブ波長格子,透過型可変減衰器,平行平板静電アクチュエータ