[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

△ [19a-B4-3] Asymmetrical surface lattice structures of plasmonic metamaterials for multi-wavelength selective uncooled infrared sensor

^○Yousuke Takagawa¹, Kyouhei Masuda¹, Shinpei Ogawa², Masafumi Kimata¹ (Ritsumeikan Univ¹, Mitsubishi Electric Corp²)

Keywords:plasmon,MEMS