Effects of Thermal Annealing on the Surface Crystal Structure of YAlO<sub>3</sub>

Presentation information

Oral presentation

09. Applied Materials Science » 9.1 Dielectrics, ferroelectrics

Thu. Sep 19, 2013 9:30 AM - 12:00 PM C11 (TC3 2F-210)

11:00 AM - 11:15 AM

^○(M1)Takahiro Inoue¹, Shoji Kaneko¹, Takaaki Morimoto¹, Yosuke Morii¹, Yoshimichi Ohki¹ (Waseda Univ.¹)

Keywords:High-k,YAlO3,Annealing