The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

08. Plasma Electronics » 8.5 Plasma nanotechnology

[19a-C2-1~12] 8.5 Plasma nanotechnology

Thu. Sep 19, 2013 9:00 AM - 12:15 PM C2 (TC3 1F-102)

9:00 AM - 9:15 AM

△ [19a-C2-1] Rapid deposition of DLC by plasma CVD in initial stage

○Toru Harigai1, Yuuki Yasuoka1, Yoshiaki Kakuta1, Hiroshi Furuta1,2, Akimitsu Hatta1,2 (Kochi Univ. Technol.1, Inst. Nanotechnol., Kochi Univ. Technol.2)

Keywords:DLC,プラズマCVD