Relationship between Enhanced Emission of Ar Plasma by SiH<sub>4</sub> Pulsed Supply and Formed Silicon Nanocrystals

Presentation information

Oral presentation

08. Plasma Electronics » 8.5 Plasma nanotechnology

Thu. Sep 19, 2013 9:00 AM - 12:15 PM C2 (TC3 1F-102)

12:00 PM - 12:15 PM

^○Kazufumi Ikemoto¹, Yoshifumi Nakamine¹, Yukio Kawano¹, Shunri Oda¹ (QNERC, Tokyo Tech.¹)

Keywords:Siナノ粒子,プラズマCVD