Epitaxial growth of SmFe7 films using the RF magnetron sputtering method

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

Thu. Sep 19, 2013 9:00 AM - 1:00 PM C7 (TC3 1F-117)

11:45 AM - 12:00 PM

^○Takeshi Kusumori¹, Kenta Takagi¹, Hiroyuki Nakayama¹, Mizue Mizoshiri¹, Kimihiro Ozaki¹ (AIST Chubu¹)

Keywords:磁石薄膜,スパッタ