The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19a-D1-1~11] 6.1 Ferroelectric thin films

Thu. Sep 19, 2013 9:00 AM - 12:00 PM D1 (MK 1F-101)

11:30 AM - 11:45 AM

[19a-D1-10] The Wet Etching Technique of KNN films by EDTA

Fumimasa Horikiri1, Kenji Shibata1, Kazufumi Suenaga1, Kazutoshi Watanabe1, Masaki Noguchi1 (Hitachi Cable, Ltd.1)

Keywords:圧電体,非鉛,薄膜