A GaAs/Air multilayer cavity structure fabricated by sacrificial etiching using small hole arrays

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.2 Ultrathin films and quantum nanostructures

Thu. Sep 19, 2013 9:30 AM - 12:00 PM D6 (MK 3F-301)

10:15 AM - 10:30 AM

^○Hidetada Komatsu¹, Yoshinori Nakagawa^1,2, Ken Morita¹, Takahiro Kitada¹, Toshirou Isu¹ (Univ. of Tokushima¹, NICHIA Corp.²)

Keywords:微小共振器構造