Deposition of SiC ultrathin-film on micro/nanosilicon

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.2 Ultrathin films and quantum nanostructures

Thu. Sep 19, 2013 9:30 AM - 12:00 PM D6 (MK 3F-301)

11:30 AM - 11:45 AM

^○Kentaro Konno¹, Junji Yasunaga¹, Mitsuya Motohashi¹ (Tokyo Denki Univ.¹)

Keywords:SiC,超薄膜,マイクロ・ナノシリコン