[19a-P2-1~29] 5 Optoelectronics(poster)

[19a-P2-15] P⁺InGaAsP Formation by Zn Diffusion for InGaAsP Photonic-wire Optical Switches

^○Yuki Ikku¹, Munetaka Noguchi¹, Masafumi Yokoyama¹, Osamu Ichikawa², Takenori Osada², Masahiko Hata², Mitsuru Takenaka¹, Shinichi Takagi¹ (Univ. Tokyo¹, Sumitomo Chemical Co. Ltd.²)

Keywords:光スイッチ,III-V CMOS フォトニクス,Zn拡散