The 74th JSAP Autumn Meeting,2013

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Poster presentation

05. Optoelectronics » 5 Optoelectronics(poster)

[19a-P2-1~29] 5 Optoelectronics(poster)

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P2 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P2-6] Ta2O5 optical waveguide on silica substrate fabricated by CF4 reactive ion etching

○Gen Li1, Yue Zhao1, Takeo Maruyama1, Koichi Iiyama1 (Graduate School of Natural Science and Technology, Kanazawa Univ.1)

Keywords:光導波路,五酸化タンタル