The 74th JSAP Autumn Meeting,2013

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Poster presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[19a-P3-1~27] 6.3 Oxide-based electronics

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P3 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P3-27] Glancing Angle Deposition of TiO2 Films by Sputtering and Oxygen Ion Assisted Evaporation Method

○Yoichi Hoshi1, Yoji Yasuda1, Naoto Kitaha1 (Tokyo Polytechnic Univ.1)

Keywords:斜め入射堆積,TiO2,光触媒