9:30 AM - 11:30 AM
[19a-P7-6] MISFETs with Ion Implanted Isolation Layers on p-GaN Substrate
Keywords:GaN,素子分離,イオン注入
Poster presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology
Thu. Sep 19, 2013 9:30 AM - 11:30 AM P7 (Davis Memorial Auditorium)
9:30 AM - 11:30 AM
Keywords:GaN,素子分離,イオン注入