[19a-P9-1~10] 15.6 IV-group-based compounds

[19a-P9-1] Simulation studies on the generation mechanism of giant step bunching on 4H-SiC epitaxial layers

^○Yuuki Ishida¹, Sadafumi Yoshida¹ (AIST¹)

Keywords:巨大ステップバンチング,4H-SiC