Real-time observation of the oxidation process of nonpolar hexagonal SiC surfaces

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P9 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

^○Daisuke Goto¹, Shuhei Yagi¹, Yasuto Hijikata¹, Hiroyuki Yaguchi¹ (Saitama Univ.¹)

Keywords:SiC,熱酸化,分光エリプソメトリー