9:30 AM - 11:30 AM
[19a-P9-5] Thermal etching properties of SiC using different halogen gases
Keywords:SiC,ハロゲン,エッチング
Presentation information
Poster presentation
15. Crystal Engineering » 15.6 IV-group-based compounds
[19a-P9-1~10] 15.6 IV-group-based compounds
Thu. Sep 19, 2013 9:30 AM - 11:30 AM P9 (Davis Memorial Auditorium)