[19p-A12-1~13] 7.6 Ion beams

[19p-A12-2] Clarification of progress during field induced oxygen etching for preparation of gas field ion source with ideal shape

^○(M1)Shu Kato¹, Takayuki Asai¹, Sigekazu Nagai^1,2, Tatuo Iwata², Kazuo Kajiwara², Kouiti Hata^1,2, Kouji Asaka³, Yahati Saito³ (Graduate School of Eng., Mie Univ.¹, CUTE², Graduate School of Eng., Nagaya Univ.³)

Keywords:電界誘起酸素エッチング