[19p-A13-1~7] 7.4 Nanoimprint

[19p-A13-6] Fabrication of high aspect ratio glass structures using electrostatic imprint process

^○Naoki Ikutame¹, Hiroshi Ikeda², Daisuke Sakai¹, Kenji Harada³, Syusaku Akiba⁴, Toshio Suzuki⁴, junji Nishii¹ (Hokkaido Univ.¹, Kyusyu Univ.², Kitami inst. of Tech.³, Asahi Glass Research Center⁴)

Keywords:インプリント,電圧印加,ガラス