The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[19p-A13-1~7] 7.4 Nanoimprint

Thu. Sep 19, 2013 1:30 PM - 3:30 PM A13 (TC1 3F-323)

3:15 PM - 3:30 PM

[19p-A13-7] Fabrication of Metallic Glass Grating for X-ray Talbot Interferometer

○Wataru Yashiro1, Daiji Noda2, Tadashi Hattori2, Koichi Hayashi3, Atsushi Momose1, Hidemi Kato3 (IMRAM, Tohoku Univ.1, School of Eng., Nagoya Univ.2, IMR, Tohoku Univ.3)

Keywords:インプリント,Ｘ線イメージング,金属ガラス