The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.1 Fundamental properties and their evaluation in disordered materials

[19p-A2-1~17] 16.1 Fundamental properties and their evaluation in disordered materials

Thu. Sep 19, 2013 1:30 PM - 6:15 PM A2 (TC1 1F-116)

4:30 PM - 4:45 PM

[19p-A2-12] Photothermal radiometry for estimation of defect density in silicon thin films

○(M2)Katsunori Ishi1, Yosuke Matsuda1, Norimitsu Yoshida1, Shuichi Nonomura1 (Gifu Univ.1)

Keywords:光熱輻射分光法,欠陥密度,シリコン系薄膜