4:30 PM - 4:45 PM
[19p-A2-12] Photothermal radiometry for estimation of defect density in silicon thin films
Keywords:光熱輻射分光法,欠陥密度,シリコン系薄膜
Oral presentation
16. Amorphous and Microcrystalline Materials » 16.1 Fundamental properties and their evaluation in disordered materials
Thu. Sep 19, 2013 1:30 PM - 6:15 PM A2 (TC1 1F-116)
4:30 PM - 4:45 PM
Keywords:光熱輻射分光法,欠陥密度,シリコン系薄膜