The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

08. Plasma Electronics » 8.1 Plasma production and control

[19p-C1-1~17] 8.1 Plasma production and control

Thu. Sep 19, 2013 1:30 PM - 6:00 PM C1 (TC3 1F-101)

1:30 PM - 1:45 PM

△ [19p-C1-1] Enlargement of Multi-Purpose Microwave Antenna and High-Density Plasma Production

○Shogo Kondo1, Suguru Nakano1, Noriharu Takada1, Hirotaka Toyoda1,2 (Nagoya Univ.1, PLANT,Nagoya Univ.2)

Keywords:マイクロ波プラズマ