[19p-C1-1~17] 8.1 Plasma production and control

△ [19p-C1-10] Numerical Simulation of film thickness distribution for magnetic fields in Reactive Plasma Deposition method by 3D-Hybrid PIC/MCC method

^○Masaru Miyashita¹, Hisashi Kitami¹, Toshiyuki Sakemi¹, Yasushi Aoki¹, Takanori Kato¹ (SHI¹)

Keywords:反応性プラズマ,ハイブリッドPIC/MCC,プラズマモデリング